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    HORIBA質量流量控制器

    horiba流量控制器

    產品分類:HORIBA質量流量控制器

    產品介紹

      Z512, Z522 Digital / Analog

      Mass Flow Controller / Meter

      SEC-Z512MGX SEC-Z522MGXN SEC-Z522MGX

      SEC-Z512X SEC-Z522XN SEC-Z522X

      SEF-Z512MGX SEF-Z522MGXN SEF-Z522MGX

      SEF-Z512X SEF-Z522XN SEF-Z522X

      Full-scale flow rate MR/MG number

      (N2 conversion flow rate) #R01:10SCCM

      #R1.5:17.5SCCM

      #01:30SCCM

      #1.5:55SCCM

      #02:100SCCM

      #2.5:175SCCM

      #03:300SCCM

      #3.5:550SCCM

      #04:1SLM

      #4.5:1.75SLM

      #05:3SLM

      #5.5:5.5SLM

      #06:10SLM

      Valve Type

      Flow rate at fully closed control valve

      Flow rate control range

      Flow rate measuring range (SEF)

      Operating temperature

      Response

      Linearity

      Repeatability

      50 to 300 kPa (d)

      #5.5, #06: 100 to 300 kPa (d)

      Operating differential pressure (SEF)

      MAX. Operating pressure

      Pressure resistance

      Leak Integrity

      Flow rate setting signal

      Flow rate output signal

      Wetted materials

      1/4 inch VCR equivalent

      Option: 1.125 inch IGS

      Mounting orientation

      *1 The gas type and full scale settings for the SEC(SEF)-Z512MGX, Z522MGX, and Z522MGXN can be changed

      by the operator, using special software.

      *2 The flow rate precision guaranteed temperatures conform to SEMI E56-1296 standards. The precision is that

      associated with the full-scale MR and MG number values.

      *3 IGS: Integrated Gas System

      * SCCM and SLM are notations indicating the gas flow rate (mL/min, L/min, at 0°C and 101.3 kPa).

      Mass flow controller model *1 SEC-Z512KX

      Mass flow meter model *1 SEF-Z512KX

      O: Normally open C: Normally closed

      ≤ 2% F.S.

      2-100% of F.S.

      1/2SCCM

      MR/MG number

      #6.5: 22SLM

      #07: 30SLM

      #08: 50SLM

      0-100% of F.S.

      Accuracy *2 ±1.0%F.S. ±1.0%S.P.(Flow rate>25%F.S.)

      ±0.25%F.S.(Flow rate≤25%F.S.)

      5 to 50°C (recommended temperature range: 15 to 45°C)

      ≤ 1 second: Over full flow rate range

      ≤ ±0.5% F.S.

      ≤ ±0.2% F.S.

      Operating differential pressure 50 to 300 kPa (d) 200 to 300 kPa (d)

      ≤ 300 kPa (d)

      450 kPa (g)

      1000 kPa (g)

      ≤ 5 x 10-12 Pa·m3/s (He)

      0.1 to 5 V DC (2% to F.S.); Input impedance 1 Mù or higher

      0 to 5 V DC (0% to F.S.); Minimum load resistance 2 kù or higher

      Digital interface

      With address function: RS-485 (transmission speed 38,400 bps)

      F-Net Protocol

      316L Stainless Steel (polished surface)

      Power supply

      +15V±5% 150mA

      -15V±5% 150mA

      Signal response

      Analog: D-Sub 9-pin (TOP)

      Digital: 2 LAN jacks (TOP)

      Standard Fitting *3

      1/4 inch VCR equivalent

      Option: 1.125 inch IGS, 1.5 inch IGS

      1.5 inch IGS

      Free

      Z512/522 Web Ver.001

      Subject to change without notice.

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